Modern optical polishing introduces mid-spatial frequency errors. Few standards exist to specify and measure mid-spatial frequencies. We propose Fizeau interferometry’s application characterized by power spectral density due to its flexibility and easy physical interpretation.
Modern requirements for detailed, precise and reliable measurements of optical components are driving the need for improved modern interferometric performance. Characterizing mid-spatial frequencies, fully automated polishing, and aspheric surface measurements all require a higher caliber of interferometric measurement quality. As performance requirements change, the ability to assess an interferometer’s performance must also improve. One crucial aspect of performance concerns spatial resolution. Currently, assessing spatial resolution is a challenge which cannot be solved with standard methods such as directly applying MTF. Here, we present the case for using a Binary Pseudo-Random Array (BPRA) with commercially-available BPRAs to address this key issue.
COMMON PATH, INTERFEROMETRIC SYSTEMS AND METHODS USING A BIREFRINGENT MATERIAL FOR TOPOGRAPHIC IMAGING, Piotr Szwaykowski, Tucson, AriZ., Michael Greenebaum, Brooklyn, Theodore S. Shultz, Larchmont, both of NY. USPO # 5,973,784, 1999
SIMULTANEOUS PHASE SHIFTING MODULE FOR USE IN INTERFEROMETRY, Piotr Szwaykowski, Glendale, CA (US); Raymond J. Castonguay, Tucson, AZ, (US); Frederick N. Bushroe, Tucson, AZ (US), USPO #7,483,145, 2009
SCANNING SIMULTANEOUS PHASE-SHIFTING INTERFEROMETER, Raymond Castonguay Tucson AZ, Piotr Szwaykowski, USPO # 7,561,279 2009
INTERFEROMETRIC SYSTEM WITH REDUCED VIBRATION SENSITIVITY AND RELATED METHOD, Piotr Szwaykowski, Glendale, CA (US); Raymond J. Castonguay, Tucson, AZ, (US); Frederick N. Bushroe, Tucson, AZ (US), USPO #8,004,687, 2011
Olszak, A., ‘Lateral-scanning interferometer with tilted optical axis’, US6449048.
Schmit, J. & Olszak, A., ‘Correction of scanning errors in interferometric profiling’, US6624893.
Olszak, A. & Schmit, J., ‘Scanning interferometry with reference signal’, US6624894.
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Olszak, A. G., ‘Best-focus estimation by lateral scanning’, US7330574.
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R. Smythe, D. Battistoni; Method for calibration and removal of wavefront errors, ; US Patent No. 7,405,833
P. de Groot, J. Biegen, L, Deck, R. Smythe; Calibration standard for optical gap measuring tools, US Patent No. 5,724,134
R. Smythe, G. Richarson, J. Bunkenburg; Compact, Linear Measurement Interferometer with Zero Abbe Error, ; US Patent No. 4,509,858, 1985
Spectrally Controlled Interferometry
Thin Optical Window Measurement with a Spectrally Controlled Interferometer
Chase Salsbury, Äpre Instruments, LLC (United States)College of Optical Sciences, The Univ. of Arizona (United States); Artur G. Olszak, Äpre Instruments, LLC (United States), ASPE Interferometry Topical Meeting, Tucson AZ 2017
Spectrally controlled interferometry for measurements of flat and spherical optics
Chase Salsbury, Äpre Instruments, LLC (United States)College of Optical Sciences, The Univ. of Arizona (United
States); Artur G. Olszak, Äpre Instruments, LLC (United States)
Published in Proceedings Volume 10448: Optifab 2017
Asphere Metrology
Nulling Fizeau Interferometer for Aspheric Surface Measurements, Piotr Szwaykowski and Artur Olszak, http://dx.doi.org/10.1364/OFT.2010.OThA3
R. Smythe; Asphere interferometry powers precision lens manufacturing, Laser Focus World, October 2006
Piotr Szwaykowski; Raymond Castonguay; Measurements of aspheric surfaces. Proc. SPIE 7063, Interferometry XIV: Techniques and Analysis, 706317 (August 11, 2008); doi:10.1117/12.804731.
Vibration Insensitive Interferometry
ERRORS CAUSED BY STATIC GRADIENTS IN THE ATMOSPHERE IN MEASUREMENTS OF LARGE OPTICS. Piotr Szwaykowski, ICOP 2009-International Conference on Optics and Photonics, Chandigarh, India, 30 Oct.-1 Nov. 2009
R. Smythe, R. Moore, Instantaneous Phase Measuring Interferometry, SPIE Vol. 429, 1983 (203 Citations)
Interferometric Metrology
R. Smythe; Practical aspects of modern interferometry for optical manufacturing quality control, Part 1, 2, & 3, Adv. Opt. Tech. 1-2, pp. 59–64 (2012), AOT 3, pp. 203–212 (2012), AOT 4, pp, 335-342
Han, S.; Lamb, J.; Novak, E. & Olszak, A., ”Design of an Interferometer for the Measurement of Long Radius Optics”, in Proc. SPIE Vol. 3966, p. 377-384, Machine Vision Applications in Industrial Inspection VIII, 2000.
Kujawińska, M.; Salbut, L., Olszak, A. & Forno, C., ”Automatic Analysis of Residual Stresses in Rails Using Grating Interferometry, in J. E. Silva Gomes et al., ed.,’Recent Advances in Experimental Mechanics’, A. A. Balkema, Rotterdam, pp. 699-704, 1994.
Olszak, A.; Novak, E.; Stumpe, K. & Semrad, J., ‘‘High Performance Interferometer for Site Flatness Inspection”, in ‘Proc. SPIE 3475’, p. 408-415, 1999.
Olszak, A. & Patorski, K., ‘Modified electronic speckle pattern interferometer with reduced number of elements for vibration analysis’, Opt. Commun.(138), 265—269, 1997.
Olszak, A. & Patorski, K., Integrated Fiber Optic Speckle Interferometer for Vibration Amplitude and Phase Measurements with Automatic Analysis of Results, in ‘Mechatronika’97’, Prace Naukowe PW, pp. 854—860, 1997.
Olszak, A. & Patorski, K. (1997), ‘Frequency Modulated Fibre Optic ESPI and its Applications. Part I: Hardware and Software Design’, Optoelectronic Review 5, 69—81.
Olszak, A. & Patorski, K. (1997), ‘Frequency Modulated Fibre Optic ESPI and its Applications. Part II:Selected Applications’, Optoelectronic Review 5, 82—91.
Olszak, A. & Patorski, K. (1996), Integrated fiber optic electronic speckle pattern interferometer for investigations of static and dynamic phenomena and contouring, in ‘Proc. COE’96’, pp. 55—58.
Olszak, A.; Patorski, K. & Salbut, L. (1996), Comparative studies of ESPI and grating interferometry methods used for determination of in-plane displacements in presence of out-of-plane displacement gradients, in Z. Fuzessy et al., ed.,’Simulation and Experiment in Laser Metrology’, Akademie Verlag, , pp. 135—139.
Olszak, A. & Pryputniewicz, R. J. (1995), ESPI-FEM hybrid system for studies of time-dependent stress characteristics in small components, in ‘Proc. SPIE 2545’, pp. 43—53.
Olszak, A.; Schmit, J. & Heaton, M. (2001), ‘Interferometric approaches each have advantages’, Laser Focus World, 93—95.
Olszak, A.; Stumpe, K.; Copenhaver, R. & Angeli, G. (1999), High Speed Interferometric Aluminum Disk Blank Tester, in ‘Proc. SPIE 3619’, pp. 92—100.
Wronkowski, L. & Olszak, A. (1994), Influence of Transmission Parameters of Diffraction Gratings on Metrological Parameters of Optoelectronical Gauges, in ‘Proc. Mechatronika’94’.
Wronkowski, L.; Tkaczyk, T. & Olszak, A. (2000), ‘Opto-Electronic Displacement Gauge Based on Speckle Interferometer’, Opt. Laser Eng. 32, 65-77.
Zipperian, D. C. & Olszak, A. G. (1999), Thin-Film Head Wafer Substrate Flatness Inspection’Datatech’, ICG Publishing Ltd., pp. 127-130.
R. Smythe; Simple Fast and Adaptable, New-Generation Interferometers, Photonics Spectra, August 90
B. Truax, J. Soobitsky, R. Smythe, Recent Advances in Interferometry at Zygo, SPIE Conference, August 87.
Interferometric Microscopy
Caber, P. J.; Olszak, A.; Ragan, C. & Aziz, D. J., “Present and future interference microscope systems for magnetic head metrology”, in Proc. SPIE Vol. 4099, p. 166-175, 2000.
Novak, E.; Olszak, A.; Stumpe, K.; Knowlden, B.; Malevanchik, L. & Angeli, G., ”Laser Fizeau Interferometer for Silicon Wafer Site Flatness Testing”, in Proc. SPIE 3619, pp. 101-109, 1999.
Olszak, A. , ”Improved fast white-light scanning profilometer”, in ‘Proc. SPIE 4101’, pp. 173-184, 2000.
Olszak, A. & Schmit, J., ‘High-stability white-light interferometry with reference signal for real-timecorrection of scanning errors’, Opt. Eng., vol. 42, no1, pp. 54-59, 2003.
Schmit, J. & Olszak, A. (2002), ‘High precision shape measurement by white light interferometry with real-time scanner error correction’, Appl. Opt., Oct 1, 41(28), p. 5943-50.
F. Demarest, R. Smythe; Sub-Angstrom, Vertical Resolution, Three Dimensional Phase Measuring Microscope, ASPE 90, Rochester NY
R. Smythe; Technical overview of Maxim3D, First Surface Roughness Conference, Tokyo Japan
Artur Olszak, (2002), ‘Lateral Scanning White-Light Interferometer’, Appl. Opt., Vol. 39, Issue 22, pp. 3906-3913.
High Resolution Phase Measuring Laser Interferometric Microscope for Engineering Surface Metrology, J. Biegen, R. Smythe, SPIE Vol. 1009 , Hamburg FRG September, 1988
R. Smythe; Heterodyne Profiling Interferometer, ASPE Dallas TX 1988
Data Acquisition Techniques
Piotr Szwaykowski and Krzysztof Patorski, “Moire fringes by evolute gratings,” Appl. Opt. 28, 4679-4681 (1989), http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-28-21-4679
Kosiński, C.; Olszak, A. & Kujawińska, M., ‘Adaptive system for smart image processing’, in Machine Graphics and Vision 5(1/2), p. 245-256, 1996.
Olszak, A., Pluta, M., ed. (1999), Computer Aided Electronic Speckle Pattern Interferometer Using Fiber Optics and Laser Diode, Polish Chapter SPIE, Warsaw, Poland.
Patorski, K. & Olszak, A. (1997), ‘Digital in-Plane Electronic Speckle Pattern Shearing Interferometry’, Opt. Eng. 36(7), 2010—2015.
Patorski, K. & Olszak, A. (1997), Opto-Digital Determination of the Derivative of Out-of-Plane Displacements Using Modified in-Plane ESPI, in W. Jüptner et al., ed.,’Automatic Processing of Fringe Images’, Akademie Verlag, , pp. 257—281.
Patorski, K. & Olszak, A. (1996), Modified in-plane electronic speckle pattern shearing interferometry (ESPSI), in ‘Proc. SPIE 2860’, pp. 256—262.
Precision Engineering
C. Furlong, A. Olszak, and R. J. Pryputniewicz, “Nondestructive damage evaluation of a dynamically loaded structure using opto-mechanical techniques”, Proc. 12th UACEM Symposium-SEM, pp. 59, Bethel, CT, 1995
Miscellaneous
R. Smythe, The measure of metrology, Proceedings of the ASPE Annual Meeting, October 2009
Stefan R. Martin; Piotr Szwaykowski; Frank M. Loya; Kurt Liewer; Progress in testing exo-planet signal extraction on the TPF-I planet detection testbed. Proc. SPIE 6268, Advances in Stellar Interferometry, 626818 (June 27, 2006); doi:10.1117/12.672646.
Stefan Martin; Piotr Szwaykowski; Frank Loya; Testing exo-planet signal extraction using the Terrestrial Planet Finder planet detection testbed. Proc. SPIE 5905, Techniques and Instrumentation for Detection of Exoplanets II, 590508 (September 14, 2005); doi:10.1117/12.615559.
Olszak, A. & Tatam, R. (1997), ‘Calibration of optical path imbalance in fibre optic ESPI system’, Meas. Sci. Technol. 8(7), 321—334.
Olszak, A. & Wronkowski, L. (1997), ‘Analysis of Fresnel field of a double diffraction system in case of two amplitude binary gratings in partially coherent illumination’, Opt. Eng. 36(8), 2149—2157.
Artur G. Olszak, Chen Liang, James F. Goodall, Pixuan Zhou, William C. Russum, Andy Lowe, Marcin Michalak, Feng Zheng, Michael R. Descour, Ronald S. Weinstein, Peter H. Bartels, and James C. Wyant (2005), ‘Development and Applications of Array Microscope Technology’, in ‘Proc Frontiers in Optics (FiO)’, Tucson, AZ, Oct 16, 2005.
Chen Liang, Artur G. Olszak, and Michael R. Descour (2003), ‘Imaging using array microscope’, in ‘Proc Frontiers in Optics (FiO)’, Tucson, AZ, Oct 5, 2003.
Olszak, AG, and MR Descour, Microscopy in Multiples, IEEE OEMagazine, 5: 16-18, 2005.
Weinstein RS, Descour MR, Liang C, Barker G, Scott KM, Richter L, Krupinski EA, Bhattacharyya AK, Davis JR, Graham AR, Rennels M, Russum WC, Goodall JF, Zhou P, Olszak AG, Williams BH, Wyant JC, Bartels PH (2004). ‘An array microscope for ultrarapid virtual slide processing and telepathology. Design, fabrication, and validation study’. Hum Pathol. 35:1303-1314, 2004.
Weinstein RS, Descour MR, Liang C, Richter L, Russum WC, Goodall JF, Zhou P, Olszak AG, Bartels PH (2005), ‘Reinvention of light microscopy. Array microscopy and ultrarapidly scanned virtual slides for diagnostic pathology and medical education’. In: Virtual microscopy and Virtual Slides in Teaching, Diagnosis and Research, CRC Press, pp 9-35, 2005.
Piotr Szwaykowski and Victor Arrizon, “Talbot array illuminator with multilevel phase gratings,” Appl. Opt. 32, 1109-1114 (1993) http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-32-7-1109
Nondiffracting beams and the self-imaging phenomenon, Piotr Szwaykowski, Jorge Ojeda-Castañeda, Instituto Nacional de Astrofisica, Optica y Electronica, Apartado Postal 216, 72 000 Puebla, Pue., México
Piotr Szwaykowski, “Self-imaging in polar coordinates,” J. Opt. Soc. Am. A 5, 185-191 (1988), http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-5-2-185
Piotr Szwaykowski, “Talbot effect reinterpreted: comment,” Appl. Opt. 32, 3466-3467 (1993)
Piotr Szwaykowski; Polarization-based fringe projection interferometer for phase-stepping techniques.
R. Smythe, The measure of metrology, Proceedings of the ASPE Annual Meeting, October 2009
Stefan R. Martin; Piotr Szwaykowski; Frank M. Loya; Kurt Liewer; Progress in testing exo-planet signal extraction on the TPF-I planet detection testbed. Proc. SPIE 6268, Advances in Stellar Interferometry, 626818 (June 27, 2006); doi:10.1117/12.672646.
Stefan Martin; Piotr Szwaykowski; Frank Loya; Testing exo-planet signal extraction using the Terrestrial Planet Finder planet detection testbed. Proc. SPIE 5905, Techniques and Instrumentation for Detection of Exoplanets II, 590508 (September 14, 2005); doi:10.1117/12.615559.
Olszak, A. & Tatam, R. (1997), ‘Calibration of optical path imbalance in fibre optic ESPI system’, Meas. Sci. Technol. 8(7), 321—334.
Olszak, A. & Wronkowski, L. (1997), ‘Analysis of Fresnel field of a double diffraction system in case of two amplitude binary gratings in partially coherent illumination’, Opt. Eng. 36(8), 2149—2157.
Artur G. Olszak, Chen Liang, James F. Goodall, Pixuan Zhou, William C. Russum, Andy Lowe, Marcin Michalak, Feng Zheng, Michael R. Descour, Ronald S. Weinstein, Peter H. Bartels, and James C. Wyant (2005), ‘Development and Applications of Array Microscope Technology’, in ‘Proc Frontiers in Optics (FiO)’, Tucson, AZ, Oct 16, 2005.
Chen Liang, Artur G. Olszak, and Michael R. Descour (2003), ‘Imaging using array microscope’, in ‘Proc Frontiers in Optics (FiO)’, Tucson, AZ, Oct 5, 2003.
Olszak, AG, and MR Descour, Microscopy in Multiples, IEEE OEMagazine, 5: 16-18, 2005.
Weinstein RS, Descour MR, Liang C, Barker G, Scott KM, Richter L, Krupinski EA, Bhattacharyya AK, Davis JR, Graham AR, Rennels M, Russum WC, Goodall JF, Zhou P, Olszak AG, Williams BH, Wyant JC, Bartels PH (2004). ‘An array microscope for ultrarapid virtual slide processing and telepathology. Design, fabrication, and validation study’. Hum Pathol. 35:1303-1314, 2004.
Weinstein RS, Descour MR, Liang C, Richter L, Russum WC, Goodall JF, Zhou P, Olszak AG, Bartels PH (2005), ‘Reinvention of light microscopy. Array microscopy and ultrarapidly scanned virtual slides for diagnostic pathology and medical education’. In: Virtual microscopy and Virtual Slides in Teaching, Diagnosis and Research, CRC Press, pp 9-35, 2005.
Piotr Szwaykowski and Victor Arrizon, “Talbot array illuminator with multilevel phase gratings,” Appl. Opt. 32, 1109-1114 (1993) http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-32-7-1109
Nondiffracting beams and the self-imaging phenomenon, Piotr Szwaykowski, Jorge Ojeda-Castañeda, Instituto Nacional de Astrofisica, Optica y Electronica, Apartado Postal 216, 72 000 Puebla, Pue., México
Piotr Szwaykowski, “Self-imaging in polar coordinates,” J. Opt. Soc. Am. A 5, 185-191 (1988), http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-5-2-185
Piotr Szwaykowski, “Talbot effect reinterpreted: comment,” Appl. Opt. 32, 3466-3467 (1993)
Piotr Szwaykowski; Polarization-based fringe projection interferometer for phase-stepping techniques.
