System Overview
Description
Standard Fizeau Interferometer with external SCI source
Measures surface form, angles and transmitted wavefront
Measures surface form, angles and transmitted wavefront
Data Acquisition
Electronic Vibration Tolerant Phase Shifting, down to 100 µm thickness
Polarization of Interferometer
Typically circular
Source Overview
Description
Proprietary, coherence controlled illumination, external to interferometer
Wavelengths available
660 nm (other wavelength possible)
SCI source feed
Fiber Optic 3 meters nominal
Weight
7 kg (15.4 lbs)
L X W X H mm (inch)
275 X 250 X 160 ( 11 X 10 X 6.3)
Typical Applications of a Laser Fizeau Interferometer with SCI Source
Plates/Windows/ Waveplates
Prisms, Any size >100 µm per side
Performance: SCI Interferometer
Imaging Specifications (Resolution, Distortion, Field Flatness)
Host interferometer system dependent1
Slope Acceptance/Accuracy (Fringe Resolution & Retrace Error)
Host interferometer system dependent1
Repeatability/Accuracy
Host interferometer system dependent1
Coherence align mode
>5 meters
Range of Operation
0.5 mm to 350 mm
Minimum Internal Fizeau Thickness2
350 µm
Surface Isolation (Front or Back)
100 µm
Environment
Temperature
15°C to 30°C (59°F to 86°F)
ΔT/Δt
<1.0°C/15 minutes
Humidity
5 to 90% relative, noncondensing
Specifications subject to change without notice.
1 The performance of these interferometer specifications depends on the optical design of any specific system. Please refer to the host interferometers specification sheet, no degradation will occur due to the addition of the SCI source.
2 SCI can acquire phase shifted data in a fixed etalon (plane parallel plate) down to 350 μm thin. This is useful for wave plate and thin window and prism metrology.
