+1 520.639.8195

Laser Fizeau Interferometers

Measure surface form, mid-spatial frequencies, and transmitted wavefront



System Overview

.
S50|HR [SR]
S100|HR [SR]
S150|HR [SR]
 
Output Diameter
51 mm (2 inch)
102 mm (4 inch)
153 mm (6 inch)
Optical Centerline from table
108 mm (4.25 inch)
108 mm (4.25 inch)
133 mm (5.24 mm)
Focus Range
±2 meters
±2 meters
±4.5 meters
Size (L x W x H)
63 x 29 x 18 cm
(24.8 x 11.4 x 7 inch)
70 x 32 x 25 cm
(27.6 x12.6 x 9.8 inch)
90.2 x 40.8 x 23.9 cm
(35.5 x 16.1 x 9.4 inch)
Weight
25 kg (55 lbs)
33 kg (73 lbs)
50 kg (110 lbs)
 
Measurement Techniques
Traditional Phase-shifting, Vibration Tolerant Phase-shifting AND
Vibration Insensitive Carrier Fringe (Wavelength Shifting option available) – SCI Ready
Alignment System
2-spot with reticle with 2° capture range
Laser Source
Frequency Stabilized, SLM 633 nm HeNe (multiple power and λ options)
Laser Frequency Stability
<0.0001 nm
Coherence Length
>100 m
Output Polarization
Circular
Camera Resolution
2044 X 2044 pixels [1024 X 1024 pixels]
Shutter Speed – shortest
9 µs
Digitization
12 bits
Computer & Software
High-Performance PC, running any Windows® 64-bit OS, and REVEAL software
Mounting Configurations
Horizontal or Vertical
Accessories
Industry standard bayonet

Performance

Image Resolution (Detector Limited)
50 µm [100 μm]
100 µm [200 μm]
150 µm [300 μm]
Image Distortion
<0.1% over entire focusing range
Image Field Flatness
<30 µm (worst case) @ 2 meters part distance
Fringe Resolution
Carrier Fringe: 500 [250] fringes/aperture
PSI & VTPSI : 650 [325] fringes/aperture
Retrace Error @ 500 [250] Fringes1
< λ/20
RMS Simple Repeatability2
<0.5 nm RMS 2σ – with NO averaging
RMS Wavefront Repeatability3
<0.5 nm RMS 2σ – with NO averaging
Measurable Part Reflectivity
0.5% to 40% (direct) and 41% to 100% (with attenuation filter or coatings)

Environment

Temperature
15º C to 30º C (59º F to 86º F)
∆T/∆t
<1.0º C/15 min
Humidity
5 to 95% relative, non-condensing
Vibration Isolation
Isolation System recommended for PSI & VTPSI

Specifications subject to change without notice.

1 Retrace Error is defined as the residual error between a no tilt fringe (null) measurement (the reference), subtracted from a measurement with maximum fringes of tilt, with only the first 36 Zemike polynomials reported

2 RMS Simple Repeatability as defined as 2X the standard deviation of the RMS for 36 sequential measurements (0 averages) of a short plano cavity

3 RMS Wavefront Repeatability is defined as the mean RMS difference between a synthetic reference (defined as the average of all 36 sequential measurements) and each measurement plus 2X the standard deviation

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